Structural differences between deuterated and hydrogenated silicon nitride/oxynitride

Shih, A.A.ShihYeh, S.-H.S.-H.YehLee, S.-C.S.-C.LeeYang, T.R.T.R.YangSI-CHEN LEE2020-06-112020-06-112001https://scholars.lib.ntu.edu.tw/handle/123456789/498755Structural differences between deuterated and hydrogenated silicon nitride/oxynitridejournal article10.1063/1.13646452-s2.0-0035873288https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035873288&doi=10.1063%2f1.1364645&partnerID=40&md5=aead652423581b89e43a272cb2069901