Identification of infrared absorption peaks of amorphous silicon-carbon alloy by thermal annealing

Lin, W.-L.W.-L.LinTsai, H.-K.H.-K.TsaiLee, S.-C.S.-C.LeeSah, W.-J.W.-J.SahTzeng, W.-J.W.-J.TzengSI-CHEN LEE2020-06-112020-06-111987https://scholars.lib.ntu.edu.tw/handle/123456789/498819Identification of infrared absorption peaks of amorphous silicon-carbon alloy by thermal annealingjournal article10.1063/1.989632-s2.0-0041164874https://www.scopus.com/inward/record.uri?eid=2-s2.0-0041164874&doi=10.1063%2f1.98963&partnerID=40&md5=667d79646b2d38d9b4c601f344d8665b