Establishment of a Near-Field Photolithography Processing Experiment Prediction Model and Parameter Optimization Model

Lin, Zone-ChingZone-ChingLinYang, Ching-BeenChing-BeenYang2012-10-312018-06-282012-10-312018-06-282011http://ntur.lib.ntu.edu.tw//handle/246246/244147en-USEstablishment of a Near-Field Photolithography Processing Experiment Prediction Model and Parameter Optimization Modeljournal article10.1166/jctn.2011.1797http://ntur.lib.ntu.edu.tw/bitstream/246246/244147/-1/index.html