Structural and photoluminescence properties of ZnO films grown on 6H-SiC substrates by low-temperature atomic layer deposition

Lin, M.-C.M.-C.LinWu, M.-K.M.-K.WuYuan, K.-Y.K.-Y.YuanChen, M.-J.M.-J.ChenYang, J.-R.J.-R.YangJER-REN YANGMIIN-JANG CHEN2020-05-122020-05-122011https://scholars.lib.ntu.edu.tw/handle/123456789/491579Structural and photoluminescence properties of ZnO films grown on 6H-SiC substrates by low-temperature atomic layer depositionjournal article10.1149/2.031112jes2-s2.0-81355163411https://www.scopus.com/inward/record.uri?eid=2-s2.0-81355163411&doi=10.1149%2f2.031112jes&partnerID=40&md5=b9874bfad42cac7e422e9a2508ff1cba