Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing

Chouichi, A.A.ChouichiBlue, J.J.BlueYugma, C.C.YugmaPasqualini, F.F.PasqualiniJAKEY BLUE2020-03-022020-03-022018https://scholars.lib.ntu.edu.tw/handle/123456789/467297[SDGs]SDG9Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturingconference paper10.1109/ASMC.2018.83731592-s2.0-85048892454https://www.scopus.com/inward/record.uri?eid=2-s2.0-85048892454&doi=10.1109%2fASMC.2018.8373159&partnerID=40&md5=8db3105e290d89887659c0f429ee6eed