In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy

Chen, L.-C.L.-C.ChenYeh, S.-L.S.-L.YehTapilouw, A.M.A.M.TapilouwLee, K.-F.K.-F.LeeLIANG-CHIA CHEN2020-01-132020-01-132012https://scholars.lib.ntu.edu.tw/handle/123456789/447858In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategyjournal article10.1504/IJNM.2012.0446542-s2.0-84863138759https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863138759&doi=10.1504%2fIJNM.2012.044654&partnerID=40&md5=aa3d4da182486359a42706814c24de5f