Application of vacuum-assisted filling system with ultraviolet-light- emitting diode array to fabrication of waveguide microstructures

Weng, Y.J.Y.J.WengWeng, Y.C.Y.C.WengFang, H.S.H.S.FangYang, S.Y.S.Y.YangSEN-YEU YANG2020-01-132020-01-132009https://scholars.lib.ntu.edu.tw/handle/123456789/448167Application of vacuum-assisted filling system with ultraviolet-light- emitting diode array to fabrication of waveguide microstructuresjournal article10.1143/JJAP.48.1165022-s2.0-73849092009https://www.scopus.com/inward/record.uri?eid=2-s2.0-73849092009&doi=10.1143%2fJJAP.48.116502&partnerID=40&md5=ba7b1e98427d792341b4f1b5931db13c