Wu, C.-H.C.-H.WuKang, D.D.KangChen, P.-H.P.-H.ChenTai, Y.-C.Y.-C.TaiPING-HEI CHEN2020-01-132020-01-132016https://scholars.lib.ntu.edu.tw/handle/123456789/448087[SDGs]SDG7MEMS thermal flow sensorsjournal article10.1016/j.sna.2016.02.0182-s2.0-84962433684https://www.scopus.com/inward/record.uri?eid=2-s2.0-84962433684&doi=10.1016%2fj.sna.2016.02.018&partnerID=40&md5=817861f1bbb618ab10b8e36523df5c36