Ultra-thin Cr <inf>2</inf> O <inf>3</inf> well-crystallized films for high transmittance APSM in ArF line

Lai, F.D.F.D.LaiHuang, C.Y.C.Y.HuangChang, C.M.C.M.ChangWang, L.A.L.A.WangLON A. WANG2020-06-042020-06-042003https://scholars.lib.ntu.edu.tw/handle/123456789/497269Ultra-thin Cr <inf>2</inf> O <inf>3</inf> well-crystallized films for high transmittance APSM in ArF lineconference paper10.1016/S0167-9317(03)00179-52-s2.0-0037683144https://www.scopus.com/inward/record.uri?eid=2-s2.0-0037683144&doi=10.1016%2fS0167-9317%2803%2900179-5&partnerID=40&md5=0fc0cf7c0316401046a32b636cc1932e