Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM

Chyuan, S.-W.S.-W.ChyuanLiao, Y.-S.Y.-S.LiaoChen, J.-T.J.-T.ChenYUNN-SHIUAN LIAO2020-01-132020-01-132004https://scholars.lib.ntu.edu.tw/handle/123456789/448672Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEMjournal article10.1016/j.mejo.2004.06.0052-s2.0-3943066338https://www.scopus.com/inward/record.uri?eid=2-s2.0-3943066338&doi=10.1016%2fj.mejo.2004.06.005&partnerID=40&md5=fbb952e97379afae953c5dd10f0a7033