Shen J.-C.Wu C.-H.Chen B.-Y.Jywe W.-Y.Wen-Yuh Jywe2022-05-242022-05-242014https://www.scopus.com/inward/record.uri?eid=2-s2.0-84916925329&doi=10.1109%2fMED.2014.6961389&partnerID=40&md5=95f1a5a4ada5e3de54eba4110b65c499https://scholars.lib.ntu.edu.tw/handle/123456789/611910This study presents the control of a long-stroke precision scanning stage. The stage considered is combined by a linear motor-driven long-stroke stage (X, Y) and a piezoelectric-driven two degrees of freedom (2-DOF) nano-stage (Y, θZ). Therefore, it can provide long-stroke and high-precision positioning. The feedback signal for this stage is obtained using a 3-DOF laser interferometer measurement system. Integral sliding-mode controllers are used to control the linear motor-driven stage and PID controllers are used to control the piezo-stage for precision positioning. This paper presents the design of the controllers and the control results. Experimental results show that when X-axis scanned at speed 100mm/s, the averaged error and root mean square (RMS) error for y positioning are 10.6 nm and 13.1 nm and the averaged error and RMS error of θZ are 0.17 and 0.22 respectively. ? 2014 IEEE.Degrees of freedom (mechanics)ErrorsInterferometersLaser interferometryLinear motorsPiezoelectric actuatorsPiezoelectricityProportional control systemsSliding mode controlThree term control systemsHigh precision positioningIntegral sliding modeLaser interferometer measurementsLong strokesPrecision positioningPrecision stageRoot-mean-square errorsTwo degrees of freedomControllersconference paper10.1109/MED.2014.69613892-s2.0-84916925329