A Novel 4x4 Optical Switch Using An Anisotropically-etched Micro-mirror Array and A Bi-stable Mini-actuator Array

Yang, Y.-JY.-JYangLiao, B.-TB.-TLiao2011-02-112018-06-282011-02-112018-06-282008http://ntur.lib.ntu.edu.tw//handle/246246/222486en-USA Novel 4x4 Optical Switch Using An Anisotropically-etched Micro-mirror Array and A Bi-stable Mini-actuator Arrayjournal article