Design and comparison of control strategies for a PZT stage

Wang K.A.Chen Y.Y.Wang F.C.2019-07-032019-07-0320159.78986E+12https://www.scopus.com/inward/record.uri?eid=2-s2.0-85019009899&doi=10.6567%2fIFToMM.14TH.WC.OS8.009&partnerID=40&md5=bbd36eba7dcf02dfdd6d71309cc0214ahttps://scholars.lib.ntu.edu.tw/handle/123456789/412577Design and comparison of control strategies for a PZT stageconference paper10.6567/IFToMM.14TH.WC.OS8.0092-s2.0-85019009899