Nano–scale One-shot Microscopic Surface Profilometry Employing Two-wavelength Simultaneous Phase Shifting Interferometry

Liang-Chia ChenPhan Van TiepAbraham Mario TapilouwShyh-Tsong LinSheng-Lih YehPham Hong TuaLIANG-CHIA CHEN2021-10-142021-10-142013http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22101TIT05146001%22.&searchmode=basichttps://scholars.lib.ntu.edu.tw/handle/123456789/584409Ho Chi Minh city, VietnamNano–scale One-shot Microscopic Surface Profilometry Employing Two-wavelength Simultaneous Phase Shifting Interferometryconference paper