An effective SPC approach to monitoring semiconductor quality data with multiple variation sources

Graduate Inst. of Ind. Eng., National Taiwan Univ.Chen, ArgonArgonChenGuo, Ruey-ShanRuey-ShanGuoARGON CHENRUEY-SHAN GUO2007-04-192018-06-292007-04-192018-06-292000-06http://ntur.lib.ntu.edu.tw//handle/246246/2007041908551443application/pdf258926 bytesapplication/pdfen-US[SDGs]SDG9An effective SPC approach to monitoring semiconductor quality data with multiple variation sourcesjournal article10.1109/SMTW.2000.8831062-s2.0-84963728038http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041908551443/1/00883106.pdf