Bonding characterization, density measurement, and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films

Chattopadhyay, S.S.ChattopadhyayChen, L. C.L. C.ChenChien, S. C.S. C.ChienLin, S. T.S. T.LinChen, K. H.K. H.ChenSHIANG-TAI LIN2020-01-062020-01-0620020021-8979https://scholars.lib.ntu.edu.tw/handle/123456789/445762Bonding characterization, density measurement, and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin filmsjournal article10.1063/1.1512966WOS:000178767200043