Study on the fabrication of CMOS-MEMS and the computer-aided MEMS design

Cheng, Y.-C.Y.-C.ChengLee, C.-Y.C.-Y.LeeChang, P. Z.P. Z.ChangChen, Ping-HeiPing-HeiChenPING-HEI CHEN2021-10-142021-10-142005https://scholars.lib.ntu.edu.tw/handle/123456789/584690Study on the fabrication of CMOS-MEMS and the computer-aided MEMS designjournal article