MEMS generator of power harvesting by vibrations using piezoelectric cantilever beam with digitate electrode

Lee, B.-S.B.-S.LeeHe, J.-J.J.-J.HeWu, W.-J.W.-J.WuShih, W.-P.W.-P.ShihLee, Bor-ShunBor-ShunLeeHe, Jyun-JhangJyun-JhangHeWu, Wen-JongWen-JongWuShih, Wen-PinWen-PinShihShih, Wen-PinWen-PinShihWEN-JONG WU2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-33745840839&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/322510842885 bytesapplication/pdfMEMS generator of power harvesting by vibrations using piezoelectric cantilever beam with digitate electrodeconference paper10.1117/12.658584