In-situ scanning white light interferometry employing dual-sensing optical configuration and active fringe-locking strategy

Liang-Chia ChenSheng-Lih YehAbraham Mario TapilouwKun-Feng LeeLIANG-CHIA CHEN2021-10-142021-10-142012https://scholars.lib.ntu.edu.tw/handle/123456789/584411In-situ scanning white light interferometry employing dual-sensing optical configuration and active fringe-locking strategyjournal article