Controlling Steps During Early Stages of the Aligned Growth of Carbon Nanotubes Using Microwave Plasma Enhanced Chemical Vapor Deposition

L. C. ChenC. Y. WenC. H. LiangW. K. HongK. J. ChenH. C. ChengC. S. ShenC. T. WuK. H. Chen2020-06-202020-06-2020021616301Xhttps://scholars.lib.ntu.edu.tw/handle/123456789/503924Controlling Steps During Early Stages of the Aligned Growth of Carbon Nanotubes Using Microwave Plasma Enhanced Chemical Vapor Depositionjournal articlehttps://doi.org/10.1002/1616-3028(20021016)12:10%3C687