Hung, Shao-KangShao-KangHungLI-CHEN FU2009-02-252018-07-062009-02-252018-07-06200600189456http://ntur.lib.ntu.edu.tw//handle/246246/141100https://www.scopus.com/inward/record.uri?eid=2-s2.0-33749320998&doi=10.1109%2fTIM.2006.881571&partnerID=40&md5=bdf7d9d7471b20351f7143ed37554808The stationary-sample (scanning-probe)-type atomic force microscope (AFM) has been demonstrated to have many advantages over its conventional counterpart: the scanning-sample (stationary-probe)-type AFM. However, its major challenge is to measure the deflection of the probe while moving in three-dimensional (3-D) space. Utilizing a distinctively arranged correction lens in the optomechatronic integrated design, this paper proposes a novel laser beam tracking system to overcome the aforementioned challenge. An innovative method to minimize "false deflection" is devised. This system has been verified to achieve high scanning speed without sacrificing high tracking accuracy. © 2006 IEEE.application/pdf535715 bytesapplication/pdfen-USAtomic force microscope (AFM); Nanotopography; Optical position measurement; Optomechatronics; Scanning probe microscope (SPM)Atomic force microscopy; Computer simulation; Lenses; Mechatronics; Optical design; Position measurement; Tracking (position); False deflection; Laser beam tracking system; Nanotopography; Optical position measurement; Optomechatronics; Laser beamsjournal article10.1109/TIM.2006.8815712-s2.0-33749320998http://ntur.lib.ntu.edu.tw/bitstream/246246/141100/1/31.pdf