Lan, W. H.W. H.LanTu, Shih-LungShih-LungTu楊聲震Yang, Seng-JennSeng-JennYang2009-02-042018-07-062009-02-042018-07-061993http://ntur.lib.ntu.edu.tw//handle/246246/120856en-USReaction Mechanism of Mercury Sensitized Phoro-CVD Silicon Oxidejournal article