Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergence

Su, Y.-S.Y.-S.SuNg, P.C.W.P.C.W.NgTsai, K.-Y.K.-Y.TsaiYUNG-YAW CHENKUEN-YU TSAI2020-06-112020-06-112008https://scholars.lib.ntu.edu.tw/handle/123456789/501108Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergenceconference paper10.1117/12.7723972-s2.0-45449107191https://www.scopus.com/inward/record.uri?eid=2-s2.0-45449107191&doi=10.1117%2f12.772397&partnerID=40&md5=0f8e069efb0a7b4284dd58010a9e694c