Interface analysis of dry etched and molecular beam epitaxial regrown AlGaAs

Grober, LHLHGroberMINGHWEI HONGMannaerts, JPJPMannaertsFreund, RSRSFreundLuftman, HSHSLuftmanChu, SNGSNGChu2018-09-102018-09-101994http://scholars.lib.ntu.edu.tw/handle/123456789/308668Interface analysis of dry etched and molecular beam epitaxial regrown AlGaAsjournal article