Wu S.K.Lin H.C.HSIN-CHIH LINPEI-LING LIU2019-11-272019-11-27200002578972https://www.scopus.com/inward/record.uri?eid=2-s2.0-0034696062&doi=10.1016%2fS0257-8972%2899%2900636-2&partnerID=40&md5=98e0bdb43dd92a3f05aaac429425cafchttps://scholars.lib.ntu.edu.tw/handle/123456789/432520An investigation of unbalanced-magnetron sputtered TiAlN films on SKH51 high-speed steeljournal article10.1016/S0257-8972(99)00636-22-s2.0-0034696062