國立臺灣大學應用力學研究所楊照彥2006-08-232018-06-292006-08-232018-06-292003-05-31http://ntur.lib.ntu.edu.tw//handle/246246/29690本計畫建立一雙極靜電晶片吸盤和其相 關特性之測試實驗系統並應用泛用型計算 軟體STAR-CD 模擬其中詳細熱傳問題。This report describes the main objectives accomplished in this project，we purpose to build and assembly a test enviroment for the study of bipolar electrostatic chucks. The numerical tool STAR-CD code was used to simulate the complete details of the heat transfer problem.application/pdf126963 bytesapplication/pdfzh-TW國立臺灣大學應用力學研究所靜電吸盤熱傳雙極式靜電晶片吸 盤electrostatic chuckheat transferBipolar ESCreporthttp://ntur.lib.ntu.edu.tw/bitstream/246246/29690/1/912622E002012CC3.pdf