Lee, Min HungMin HungLeeYu, Cheng-YaCheng-YaYuYuan, FonFonYuanChen, K.-F.K.-F.ChenLai, Chang-ChiChang-ChiLaiLiu, Chee WeeChee WeeLiu2009-03-252018-07-062009-03-252018-07-062003http://ntur.lib.ntu.edu.tw//handle/246246/148192http://ntur.lib.ntu.edu.tw/bitstream/246246/148192/1/36.pdfapplication/pdf181108 bytesapplication/pdfen-US[SDGs]SDG7Reliability Improvement of Rapid Thermal Oxide Using Gas Switchingjournal article10.1109/TSM.2003.818982http://ntur.lib.ntu.edu.tw/bitstream/246246/148192/1/36.pdf