High quality thermochromic VO2 films prepared by magnetron sputtering using V2O5 target with in situ annealing

Ho, Hsin-ChiaHsin-ChiaHoLai, Yi-ChenYi-ChenLaiChen, KaiKaiChenDao, Thang DuyThang DuyDaoHsueh, Chun-HwayChun-HwayHsuehNagao, TadaakiTadaakiNagaoCHUN-HWAY HSUEH2020-05-122020-05-12201901694332https://scholars.lib.ntu.edu.tw/handle/123456789/491203High quality thermochromic VO2 films prepared by magnetron sputtering using V2O5 target with in situ annealingjournal article10.1016/j.apsusc.2019.07.178https://linkinghub.elsevier.com/retrieve/pii/S0169433219322147