Simultaneous flare level and flare variation minimization with dummification in EUVL

Fang, S.-Y.S.-Y.FangYAO-WEN CHANG2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84863558338&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/372702Simultaneous flare level and flare variation minimization with dummification in EUVLconference paper10.1145/2228360.22285782-s2.0-84863558338