Lin, M.-F.M.-F.LinWu, J.-L.J.-L.WuChang, K.-L.K.-L.ChangLee, W.-J.W.-J.LeeChang, C.-P.C.-P.ChangLin, Y.-C.Y.-C.LinChen, P.-H.P.-H.ChenPO-HAN CHEN2021-02-042021-02-042020https://scholars.lib.ntu.edu.tw/handle/123456789/547337Recycle of synthetic calcium fluoride and waste sulfuric acid to produce electronic grade hydrofluoric acidjournal article10.1007/s11356-020-09867-xLin, M.-F.;Wu, J.-L.;Chang, K.-L.;Lee, W.-J.;Chang, C.-P.;Lin, Y.-C.;Chen, P.-H.