Development of an ultra-precision positioning stage using an opto-mechatronic component from a CD-ROM drive

PING-LANG YENLu, T.-S.T.-S.LuYan, M.-T.M.-T.Yan2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-33745648953&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/321562Development of an ultra-precision positioning stage using an opto-mechatronic component from a CD-ROM drivejournal article