Improvement of electrical performance of HfO2/SiO 2/4H-SiC structure with thin SiO2

Hsu, C.-M.C.-M.HsuHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102013http://www.scopus.com/inward/record.url?eid=2-s2.0-84887373875&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/378074Improvement of electrical performance of HfO2/SiO 2/4H-SiC structure with thin SiO2journal article10.1149/2.016308jss