Ding C.-FLin Y.-CYang C.-CHuang K.-CHsiao Y.-JYI-CHENG LINCHIEN-FANG DING2021-09-022021-09-022020https://www.scopus.com/inward/record.uri?eid=2-s2.0-85095611137&doi=10.1109%2fSAS48726.2020.9220020&partnerID=40&md5=8f744c4f44652f1b7e10df74e5d99456https://scholars.lib.ntu.edu.tw/handle/123456789/581231In this study, the tin oxide (SnO2) based gas sensor with micro heater embedded (working temperature lower than 100 °C) was developed, and the ethanol-sensing characteristic was also discussed. The mico heater presented a fast, stable heating source while gas sensing process. The result indicated that the gas sensor had more than 88% in sensitivity regarding to the 10 ppm and 30 ppm ethanol gas sensing. ? 2020 IEEE.Chemical detection; Ethanol; Gas sensing electrodes; Gases; Tin oxides; Ethanol sensing; Gas sensing; Heating source; Micro-heaters; Working temperatures; Gas detectors[SDGs]SDG7conference paper10.1109/SAS48726.2020.92200202-s2.0-85095611137