Studies of boron diffusivities on (001) and (110) substrate orientation in Si and Ge along vertical/out-of plane and lateral/in-plane directions study

M. H.Liao2019-03-112019-03-112013https://scholars.lib.ntu.edu.tw/handle/123456789/404548Studies of boron diffusivities on (001) and (110) substrate orientation in Si and Ge along vertical/out-of plane and lateral/in-plane directions studyjournal article