Investigation of YSZ thin films on silicon wafer and NiO/YSZ deposited by ion beam sputtering deposition (IBSD)

Chen, Y. J.Y. J.ChenWei, W.C.J.W.C.J.Wei2008-12-312018-06-282008-12-312018-06-282007http://ntur.lib.ntu.edu.tw//handle/246246/95400en-USInvestigation of YSZ thin films on silicon wafer and NiO/YSZ deposited by ion beam sputtering deposition (IBSD)journal article