Wu, S.-K.S.-K.WuTseng, K.-H.K.-H.TsengSHYI-KAAN WU2020-01-132020-01-132002https://scholars.lib.ntu.edu.tw/handle/123456789/448313Composition control of r.f.-sputtered Ni<inf>2</inf>MnGa thin films using optical emission spectroscopyjournal article10.2320/matertrans.43.8712-s2.0-0036577895https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036577895&doi=10.2320%2fmatertrans.43.871&partnerID=40&md5=e80e076ecee2307959e9e5f6f675c237