20nm silicon nanorods fabricated by reactive ion etch

Liang, E.-Z.E.-Z.LiangHuang, C.-J.C.-J.HuangCHING-FUH LIN2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-20344387003&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/30917520nm silicon nanorods fabricated by reactive ion etchconference paper