Multivariable control of multi-zone chemical mechanical polishing

Dept. of Chem. Eng., National Taiwan Univ.Shiu, Sheng-JyhSheng-JyhShiuYu, Cheng-ChingCheng-ChingYuShen, Shih-HaurShih-HaurShenSu, An-JhihAn-JhihSu2007-04-192018-06-282007-04-192018-06-282004http://ntur.lib.ntu.edu.tw//handle/246246/200704190855648application/pdf262702 bytesapplication/pdfen-USMultivariable control of multi-zone chemical mechanical polishingjournal article10.1109/SMTW.2004.1393737http://ntur.lib.ntu.edu.tw/bitstream/246246/200704190855648/1/01393737.pdf