A method using V-grooves to monitor the thickness of silicon membrane with μm resolution

Chang, P.-Z.P.-Z.ChangYang, L.-J.L.-J.YangPEI-ZEN CHANG2020-04-282020-04-281998https://scholars.lib.ntu.edu.tw/handle/123456789/486866A method using V-grooves to monitor the thickness of silicon membrane with μm resolutionjournal article10.1088/0960-1317/8/3/0022-s2.0-0032166241https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032166241&doi=10.1088%2f0960-1317%2f8%2f3%2f002&partnerID=40&md5=366b13e5020b3f3ae9724554bb148cac