Stable p-type ZnO films grown by atomic layer deposition on GaAs substrates and treated by post-deposition rapid thermal annealing

Cheng, Yung-ChenYung-ChenChengKuo, Ying-ShenYing-ShenKuoLi, Yun-HsiuYun-HsiuLiShyue, Jing-JongJing-JongShyueChen, Miin-JangMiin-JangChen2012-10-242018-06-282012-10-242018-06-282011http://ntur.lib.ntu.edu.tw//handle/246246/243738en-US[SDGs]SDG6Stable p-type ZnO films grown by atomic layer deposition on GaAs substrates and treated by post-deposition rapid thermal annealingjournal article10.1016/j.tsf.2011.02.072http://ntur.lib.ntu.edu.tw/bitstream/246246/243738/-1/181.pdf