The effect of patterned susceptor on the thickness uniformity of rapid thermal oxides

Lee, K.-C.K.-C.LeeChang, H.-Y.H.-Y.ChangChang, H.H.ChangHwu, J.-G.J.-G.HwuWung, T.-S.T.-S.WungJENN-GWO HWU2018-09-102018-09-101999http://www.scopus.com/inward/record.url?eid=2-s2.0-0033354769&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/347705The effect of patterned susceptor on the thickness uniformity of rapid thermal oxidesjournal article10.1109/66.778200