Pre-oxidation of AlN substrates for subsequent metallization

Yeh, C.-T.C.-T.YehTuan, W.-H.W.-H.TuanWEI-HSING TUAN2020-05-122020-05-122015https://scholars.lib.ntu.edu.tw/handle/123456789/492162Pre-oxidation of AlN substrates for subsequent metallizationjournal article10.1007/s10854-015-3160-72-s2.0-84937519178https://www.scopus.com/inward/record.uri?eid=2-s2.0-84937519178&doi=10.1007%2fs10854-015-3160-7&partnerID=40&md5=cda36d13473a2478da87e58f0c303c0b