On-Wafer Characterization of Thermomechanical Properties of Isotropic Thin Films Deposited on Anisotropic Substrates

Wu, Liang-ChiehLiang-ChiehWuChou, Yuan-FangYuan-FangChou2008-11-122018-06-282008-11-122018-06-282008http://ntur.lib.ntu.edu.tw//handle/246246/86478application/pdf334308 bytesapplication/pdfen-USOn-Wafer Characterization of Thermomechanical Properties of Isotropic Thin Films Deposited on Anisotropic Substratesjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86478/1/07.pdf