Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems

Tsai Kuen-YuYen Jia-YushJIA-YUSH YEN2019-10-222019-10-221999https://www.scopus.com/inward/record.uri?eid=2-s2.0-0033282440&partnerID=40&md5=9f13b9565eca4693b6ba163e27af314dhttps://scholars.lib.ntu.edu.tw/handle/123456789/427133Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systemsconference paper2-s2.0-0033282440