鍾添東臺灣大學:機械工程學研究所范維國Fan, Wei-KuoWei-KuoFan2010-06-302018-06-282010-06-302018-06-282008U0001-2207200814532500http://ntur.lib.ntu.edu.tw//handle/246246/187306本文研究新型爪式轉子真空幫浦之設計與分析；本研究之目的為利用新型爪式轉子，發展同時俱備低成本及高效能之乾式真空幫浦。首先，根據轉子半徑、節圓半徑、爪子厚度、外圍圓弧角度等轉子參數，提出新型爪式轉子之外形。另外發展參數化繪圖程式，經由輸入指定之參數，產生不同之爪式轉子外形；接著使用此新型爪式轉子以設計一個乾式真空幫浦。互相嚙合兩轉子間之間隙，及轉子與定子間之間隙為設計之重點。另考量特殊之轉子定位設計，使所有轉動元件間之間隙保持在所要求之精度內。同時根據幫浦零件之加工誤差，分析兩個嚙合轉子及兩個正時齒輪組之角度偏差。而真空幫浦之性能如面積效率、洩漏效應、力矩及能量消耗等，皆可由繪圖時之輸入參數進行預測。最後製造此新型爪式真空幫浦之初型，並量測此初型之性能。由實驗量測結果顯示，此新型爪式真空幫浦，比市面上之傳統魯式幫浦及兩爪式幫浦具有更好的性能。This research studies the design and analysis of a vacuum pump with new claw rotors. The purpose of this research is to develop a low cost and high performance dry vacuum pump by using new claw rotors. First, new claw rotor profiles are proposed based on rotor parameters such as pitch radius, rotor radius, claw depth, and the angle of a small arc. A parametric program is also developed to generate various claw rotor profiles with given input parameters. Then, a dry vacuum pump using the new claw rotors is designed. The design focuses on the gaps between the two matching rotors and between the rotor and the stator. Special rotor orientation design is also considered such that the gaps between all running components are limited to the required accuracy. Angle shifts between two matching rotors and between two timing gears are analyzed according to manufacturing tolerances of pump components. Performances of the vacuum pump, such as area efficiency, leakage flow effects, required torque and power consumption, are predicted based on input drawing parameters. Through the calculation of these pump performances, influences of each input parameters can be predicted. Finally, a prototype of the new claw vacuum pump is manufactured, and performances of the prototype are measured. From the measured results, it shows that this new claw vacuum pump has better performance than conventional Roots pumps and other claw vacuum pumps in the market.Acknowledgments I要 IIIBSTRACT Vable of contents VIIist of figures IXist of tables XIIIist of symbols or abbreviations XVhapter 1 Introduction 1.1 Introduction 1.2 Comparison of dry vacuum pumps 3.3 Paper review 9hapter 2 Construction of new claw vacuum pump 15.1 Conjugate curve 15.2 Design of new claw rotor 16.3 Gap design and applications 20.4 The maximum shift angle of claw rotors 24.5 Detailed design of new claw vacuum pump 27hapter 3 Performance of new claw vacuum pump 31.1 Analysis of rotor’s parameters by the area efficiency 31.2 Ideal exhausting processes 38.3 Leakage flow effect 42.4 Torque and power consumption 46hapter 4 Experiment and result 53.1 Objective 53.2 Experiment principle and method 53.3 Experimental setup 54.4 Procedures of the experiment 59.5 Measuring results and discussions 59hapter 5 Conclusions and Perspectives 63.1 Conclusions 63.2 Perspectives 65eferences 67ppendix A Different α angle versus the pitch ration and the depth ratio 69ppendix B Autolisp program for calculating the leakage flow effect 719987544 bytesapplication/pdfen-US爪式轉子爪式真空幫浦乾式真空幫浦洩漏效應claw rotorclaw vacuum pumpdry vacuum pumpleakage flowthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/187306/1/ntu-97-R95522620-1.pdf