Development of white light confocal microscopy with innovative fringe projection for full-field micro surface profilometry

Chen, L.-C.L.-C.ChenKao, W.-J.W.-J.KaoLIANG-CHIA CHEN2020-01-132020-01-132005https://scholars.lib.ntu.edu.tw/handle/123456789/447892Development of white light confocal microscopy with innovative fringe projection for full-field micro surface profilometryconference paper10.1109/ICMECH.2005.15292732-s2.0-33748917994https://www.scopus.com/inward/record.uri?eid=2-s2.0-33748917994&doi=10.1109%2fICMECH.2005.1529273&partnerID=40&md5=908499d88a4495af7260d998a3878044