Study of etching bias modeling and correction strategies for compensation of patterning process effects

Philip C. W. NgKuen-Yu TsaiLawrence S. Melvin IIIKUEN-YU TSAI2018-09-102018-09-102013-10http://scholars.lib.ntu.edu.tw/handle/123456789/381486Study of etching bias modeling and correction strategies for compensation of patterning process effectsjournal article10.1016/j.mee.2013.03.0242-s2.0-84885184381WOS:000326003600028