The leveling position control of a four-axial active pneumatic isolation system using PWM-driving parallel dual-on/off valves

Chiang, M.-H.M.-H.ChiangLin, H.-T.H.-T.LinMAO-HSIUNG CHIANG2020-01-172020-01-172012https://scholars.lib.ntu.edu.tw/handle/123456789/451552The leveling position control of a four-axial active pneumatic isolation system using PWM-driving parallel dual-on/off valvesconference paper10.4028/www.scientific.net/AMM.110-116.31762-s2.0-81255168746https://www.scopus.com/inward/record.uri?eid=2-s2.0-81255168746&doi=10.4028%2fwww.scientific.net%2fAMM.110-116.3176&partnerID=40&md5=77aca12e28c9ca13d7a49e654cce355b