T.-C. KuoJ.-F. KiangJEAN-FU KIANG2018-09-102018-09-102010-08http://scholars.lib.ntu.edu.tw/handle/123456789/359519Design of dual-axis accelerometer with CMOS-MEMSconference paper10.1109/aem2c.2010.55787602-s2.0-77958509489