Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method

Lee, Y.-M.Y.-M.LeeLi, J.-H.J.-H.LiNg, P.C.W.P.C.W.NgPei, T.-H.T.-H.PeiWang, F.-M.F.-M.WangTsai, K.-Y.K.-Y.TsaiKUEN-YU TSAIJIA-HAN LI2020-01-172020-01-172010https://scholars.lib.ntu.edu.tw/handle/123456789/451478Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain methodjournal article10.1117/1.35035322-s2.0-80455129595https://www.scopus.com/inward/record.uri?eid=2-s2.0-80455129595&doi=10.1117%2f1.3503532&partnerID=40&md5=d2bb54cb311a5f6cfcd4919111d86eec